Sealing products (Elastomers) are getting important not only for less maintenance cost and longer PM but also safety issues recently O-rings and Bonded Slit Valve Door Plate are used in the semiconductor, display and solar industry to protect delicate semiconductor components and devices from environmental contaminants such as dust, moisture, and other harmful particles. These contaminants can cause electrical malfunctions, corrosion, and degradation of the performance of the semiconductor devices, leading to reduced reliability and lifespan of the components

UPT has been providing Sealing products for semiconductor industries come in various forms, including oring, gaskets, transfer robot pads with difference materials such as FFKM, FKM, FSI and engineering plastics. These products are used to provide a barrier between the semiconductor device and the surrounding environment, ensuring the device remains protected from contaminants.

Especially UPT continually develop new FFKM (perfluoro elastomers) compounds depending on various process conditions for CVD, Etch, PVD, ALD, Diffusing and wet process with top-nauch technically that enhancing the performance from physical stress, thermal expansion, and etching resistance. Currently new compounds are focusing on less contamination materials excluding typical metallic contents or inorganic fillers.

In conclusion, sealing products play a critical role in ensuring the reliable and long-lasting performance of semiconductor devices. They provide a barrier against environmental contaminants, protect delicate components from physical stress, and maintain the required environmental conditions inside the semiconductor package.