Hanbell iPM Series

MAIN FEATURES

  • Designed by Hanbell and 100% made in Taiwan.
  • Lowest power consumption.
  • Small size, lightweight, and easy for installation.
  • Best choice for the medium harsh process.

BENEFITS

  • Provide a great capability for wide application, especially in the medium harsh process.
  • It comes from the shortest gas path of rotors.
  • Has a brilliant rotor profile sealing design.

APPLICATION

  • Load lock
  • Etch
  • Transfer
  • Metrolory
  • PVD
  • Ashing
  • CVD
  • Implant

TECHNICAL SPECIFICATION

PUMPING SPEED CURVE

For any inquiries regards this brand, please contact us at +604-2409243 or email our sales team at sales@cjenter.com.